Glossary

• CMP: Chemical Mechanical Planarization/Polishing
• DSL: Dual Stress Liner
• FDSOI: Fully Depleted SOI (Silicon On Insulator)
• ILD: Inter-Level Dielectric
• LOCOS: Local Oxidation od Silicon
• MOSIS: MOS Implementation System
• NRE: Non-Recurring Engineering
• ONO: Oxide-Nitride-Oxide
• SONOS: Silicon-Oxide-Nitride-Oxide-Silicon
• RTNO: Rapid Thermal Nitric Oxide
• SIMT: Single Instruction Multiple Threads
• STI: Shallow Trench Isolation
• SOI: Silicon On Insulator
• SSDOI: Strained Si Directly On Insulator
• SSOI: Strained Si On Insulator
• SGOI: SiGe on Insulator